Monolithic vertical combdrive actuators for adaptive optics

V. Milanović; Sunghoon Kwon; L. P. Lee

doi:10.1109/OMEMS.2002.1031441

Monolithic vertical combdrive actuators for adaptive optics

V. Milanović, Sunghoon Kwon, L. P. Lee

Department of Chemistry & Nanoscience

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

21 Scopus citations

Abstract

High aspect ratio vertical combdrive actuators are demonstrated which advance the capabilities and applications of SOI-MEMS by adding additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional pure rotation. The methodology for the first time enables monolithic fabrication of isolated vertical combdrive sets in the SOI device layer, with combfinger self-alignment and pre-engagement (initial overlap). This is demonstrated in a micromirror device, which exhibits four modes of actuation: bi-directional static optical deflection from -20° to +19°, and independent bi-directional pistoning motion from -7.5 μm to +8.25 μm. Lowest resonant frequency of the device is 1491 Hz in tilting mode and 2619 Hz in pistoning mode.

Original language	English
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	57-58
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031441
State	Published - 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: 20 Aug 2002 → 23 Aug 2002

Publication series

Name	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country/Territory	Switzerland
City	Lugano
Period	20/08/02 → 23/08/02

Bibliographical note

Publisher Copyright:
© 2002 IEEE.

Access to Document

10.1109/OMEMS.2002.1031441

Cite this

Milanović, V., Kwon, S., & Lee, L. P. (2002). Monolithic vertical combdrive actuators for adaptive optics. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 57-58). Article 1031441 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031441

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abstract = "High aspect ratio vertical combdrive actuators are demonstrated which advance the capabilities and applications of SOI-MEMS by adding additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional pure rotation. The methodology for the first time enables monolithic fabrication of isolated vertical combdrive sets in the SOI device layer, with combfinger self-alignment and pre-engagement (initial overlap). This is demonstrated in a micromirror device, which exhibits four modes of actuation: bi-directional static optical deflection from -20° to +19°, and independent bi-directional pistoning motion from -7.5 μm to +8.25 μm. Lowest resonant frequency of the device is 1491 Hz in tilting mode and 2619 Hz in pistoning mode.",

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Milanović, V, Kwon, S & Lee, LP 2002, Monolithic vertical combdrive actuators for adaptive optics. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031441, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 57-58, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 20/08/02. https://doi.org/10.1109/OMEMS.2002.1031441

Monolithic vertical combdrive actuators for adaptive optics. / Milanović, V.; Kwon, Sunghoon; Lee, L. P.
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 57-58 1031441 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - High aspect ratio vertical combdrive actuators are demonstrated which advance the capabilities and applications of SOI-MEMS by adding additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional pure rotation. The methodology for the first time enables monolithic fabrication of isolated vertical combdrive sets in the SOI device layer, with combfinger self-alignment and pre-engagement (initial overlap). This is demonstrated in a micromirror device, which exhibits four modes of actuation: bi-directional static optical deflection from -20° to +19°, and independent bi-directional pistoning motion from -7.5 μm to +8.25 μm. Lowest resonant frequency of the device is 1491 Hz in tilting mode and 2619 Hz in pistoning mode.

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Milanović V, Kwon S, Lee LP. Monolithic vertical combdrive actuators for adaptive optics. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 57-58. 1031441. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). doi: 10.1109/OMEMS.2002.1031441

Monolithic vertical combdrive actuators for adaptive optics

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