TY - GEN
T1 - Monolithic vertical combdrive actuators for adaptive optics
AU - Milanović, V.
AU - Kwon, Sunghoon
AU - Lee, L. P.
N1 - Publisher Copyright:
© 2002 IEEE.
PY - 2002
Y1 - 2002
N2 - High aspect ratio vertical combdrive actuators are demonstrated which advance the capabilities and applications of SOI-MEMS by adding additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional pure rotation. The methodology for the first time enables monolithic fabrication of isolated vertical combdrive sets in the SOI device layer, with combfinger self-alignment and pre-engagement (initial overlap). This is demonstrated in a micromirror device, which exhibits four modes of actuation: bi-directional static optical deflection from -20° to +19°, and independent bi-directional pistoning motion from -7.5 μm to +8.25 μm. Lowest resonant frequency of the device is 1491 Hz in tilting mode and 2619 Hz in pistoning mode.
AB - High aspect ratio vertical combdrive actuators are demonstrated which advance the capabilities and applications of SOI-MEMS by adding additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional pure rotation. The methodology for the first time enables monolithic fabrication of isolated vertical combdrive sets in the SOI device layer, with combfinger self-alignment and pre-engagement (initial overlap). This is demonstrated in a micromirror device, which exhibits four modes of actuation: bi-directional static optical deflection from -20° to +19°, and independent bi-directional pistoning motion from -7.5 μm to +8.25 μm. Lowest resonant frequency of the device is 1491 Hz in tilting mode and 2619 Hz in pistoning mode.
UR - http://www.scopus.com/inward/record.url?scp=84963758586&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2002.1031441
DO - 10.1109/OMEMS.2002.1031441
M3 - Conference contribution
AN - SCOPUS:84963758586
T3 - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
SP - 57
EP - 58
BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Y2 - 20 August 2002 through 23 August 2002
ER -