Molecular dynamics simulation of laser ablation of silicon

Rüdiger F.W. Herrmann, Jens Gerlach, Eleanor E.B. Campbell

Research output: Contribution to journalArticlepeer-review

35 Scopus citations


Laser ablation of silicon surfaces has been investigated by molecular dynamics (MD) simulations. Results for laser pulse lengths of 200 fs, 1 ps and 5 ps have been obtained for different pulse energy densities. Structures of approximately 100 Å × 100 Å were simulated. In some cases the impact of up to five successive laser pulses was studied. Calculations of up to 20 ps after the onset of the laser have been performed. The major part of the atoms is removed on a picosecond time scale even for fs laser pulses. Pressure waves running through the crystal could be traced. Recrystallization of melted silicon leads to irregular crystalline structures around the ablated hole. Redeposition of atoms on the surface could be observed.

Original languageEnglish
Pages (from-to)401-404
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number3
StatePublished - Feb 1997

Bibliographical note

Funding Information:
Acknowledgements 44 1 8 We acknowledgef inancial supportb y the Bundesminis-Fig. 2. Ablation rate from simulation of an 80 fs laser pulse terium ftir Bildung, Wissenschaft, Forschung und Tech-impact on a silicon surface (0.012 J/cm2). nologie (BMBF) under Grant 13N659l/ I (PROBE).


Dive into the research topics of 'Molecular dynamics simulation of laser ablation of silicon'. Together they form a unique fingerprint.

Cite this