MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

J. S. Martens; L. Lee; K. Char; R. Withers; D. Zhang; V. M. Hietala; C. P. Tigges; J. Zolper

MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

J. S. Martens
, L. Lee
, K. Char
, R. Withers
, D. Zhang
, V. M. Hietala
, C. P. Tigges
, J. Zolper

Department of Chemistry & Nanoscience

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

The confocal resonator is a tool for quick, accurate, non-invasive and flexible surface impedance measurements. From the frequency dependence of surface impedance, the vertical conductivity/permittivity profiles have been determined for a variety of devices and device materials including implanted Si and GaAs wafers and superconductor-dielectric interfaces. The vertical spatial resolution can be as small as several nm and accuracy of the complex permittivity generally is better than 3%.

Original language	English
Title of host publication	IEEE MTT-S International Microwave Symposium Digest
Publisher	Publ by IEEE
Pages	1243-1246
Number of pages	4
ISBN (Print)	0780312090
State	Published - 1993
Event	Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4) - Atlanta, GA, USA Duration: 14 Jun 1993 → 18 Jun 1993

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
Volume	3
ISSN (Print)	0149-645X

Conference

Conference	Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4)
City	Atlanta, GA, USA
Period	14/06/93 → 18/06/93

Cite this

Martens, J. S., Lee, L., Char, K., Withers, R., Zhang, D., Hietala, V. M., Tigges, C. P., & Zolper, J. (1993). MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials. In IEEE MTT-S International Microwave Symposium Digest (pp. 1243-1246). (IEEE MTT-S International Microwave Symposium Digest; Vol. 3). Publ by IEEE.

@inproceedings{2c7a5a77df00405cb62804bcffcb57bb,

title = "MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials",

abstract = "The confocal resonator is a tool for quick, accurate, non-invasive and flexible surface impedance measurements. From the frequency dependence of surface impedance, the vertical conductivity/permittivity profiles have been determined for a variety of devices and device materials including implanted Si and GaAs wafers and superconductor-dielectric interfaces. The vertical spatial resolution can be as small as several nm and accuracy of the complex permittivity generally is better than 3\%.",

author = "Martens, \{J. S.\} and L. Lee and K. Char and R. Withers and D. Zhang and Hietala, \{V. M.\} and Tigges, \{C. P.\} and J. Zolper",

year = "1993",

language = "English",

isbn = "0780312090",

series = "IEEE MTT-S International Microwave Symposium Digest",

publisher = "Publ by IEEE",

pages = "1243--1246",

booktitle = "IEEE MTT-S International Microwave Symposium Digest",

note = "Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4) ; Conference date: 14-06-1993 Through 18-06-1993",

}

Martens, JS, Lee, L, Char, K, Withers, R, Zhang, D, Hietala, VM, Tigges, CP & Zolper, J 1993, MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials. in IEEE MTT-S International Microwave Symposium Digest. IEEE MTT-S International Microwave Symposium Digest, vol. 3, Publ by IEEE, pp. 1243-1246, Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4), Atlanta, GA, USA, 14/06/93.

MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials. / Martens, J. S.; Lee, L.; Char, K. et al.
IEEE MTT-S International Microwave Symposium Digest. Publ by IEEE, 1993. p. 1243-1246 (IEEE MTT-S International Microwave Symposium Digest; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

AU - Martens, J. S.

AU - Lee, L.

AU - Char, K.

AU - Withers, R.

AU - Zhang, D.

AU - Hietala, V. M.

AU - Tigges, C. P.

AU - Zolper, J.

PY - 1993

Y1 - 1993

N2 - The confocal resonator is a tool for quick, accurate, non-invasive and flexible surface impedance measurements. From the frequency dependence of surface impedance, the vertical conductivity/permittivity profiles have been determined for a variety of devices and device materials including implanted Si and GaAs wafers and superconductor-dielectric interfaces. The vertical spatial resolution can be as small as several nm and accuracy of the complex permittivity generally is better than 3%.

AB - The confocal resonator is a tool for quick, accurate, non-invasive and flexible surface impedance measurements. From the frequency dependence of surface impedance, the vertical conductivity/permittivity profiles have been determined for a variety of devices and device materials including implanted Si and GaAs wafers and superconductor-dielectric interfaces. The vertical spatial resolution can be as small as several nm and accuracy of the complex permittivity generally is better than 3%.

UR - https://www.scopus.com/pages/publications/0027150955

M3 - Conference contribution

AN - SCOPUS:0027150955

SN - 0780312090

T3 - IEEE MTT-S International Microwave Symposium Digest

SP - 1243

EP - 1246

BT - IEEE MTT-S International Microwave Symposium Digest

PB - Publ by IEEE

T2 - Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4)

Y2 - 14 June 1993 through 18 June 1993

ER -

MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

Abstract

Publication series

Conference

Fingerprint

Cite this