MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

J. S. Martens; L. Lee; K. Char; R. Withers; D. Zhang; V. M. Hietala; C. P. Tigges; J. Zolper

MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

J. S. Martens, L. Lee, K. Char, R. Withers, D. Zhang, V. M. Hietala, C. P. Tigges, J. Zolper

Department of Chemistry & Nanoscience

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

The confocal resonator is a tool for quick, accurate, non-invasive and flexible surface impedance measurements. From the frequency dependence of surface impedance, the vertical conductivity/permittivity profiles have been determined for a variety of devices and device materials including implanted Si and GaAs wafers and superconductor-dielectric interfaces. The vertical spatial resolution can be as small as several nm and accuracy of the complex permittivity generally is better than 3%.

Original language	English
Title of host publication	IEEE MTT-S International Microwave Symposium Digest
Publisher	Publ by IEEE
Pages	1243-1246
Number of pages	4
ISBN (Print)	0780312090
State	Published - 1993
Event	Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4) - Atlanta, GA, USA Duration: 14 Jun 1993 → 18 Jun 1993

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
Volume	3
ISSN (Print)	0149-645X

Conference

Conference	Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4)
City	Atlanta, GA, USA
Period	14/06/93 → 18/06/93

Cite this

Martens, J. S., Lee, L., Char, K., Withers, R., Zhang, D., Hietala, V. M., Tigges, C. P., & Zolper, J. (1993). MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials. In IEEE MTT-S International Microwave Symposium Digest (pp. 1243-1246). (IEEE MTT-S International Microwave Symposium Digest; Vol. 3). Publ by IEEE.

@inproceedings{2c7a5a77df00405cb62804bcffcb57bb,

title = "MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials",

abstract = "The confocal resonator is a tool for quick, accurate, non-invasive and flexible surface impedance measurements. From the frequency dependence of surface impedance, the vertical conductivity/permittivity profiles have been determined for a variety of devices and device materials including implanted Si and GaAs wafers and superconductor-dielectric interfaces. The vertical spatial resolution can be as small as several nm and accuracy of the complex permittivity generally is better than 3%.",

author = "Martens, {J. S.} and L. Lee and K. Char and R. Withers and D. Zhang and Hietala, {V. M.} and Tigges, {C. P.} and J. Zolper",

year = "1993",

language = "English",

isbn = "0780312090",

series = "IEEE MTT-S International Microwave Symposium Digest",

publisher = "Publ by IEEE",

pages = "1243--1246",

booktitle = "IEEE MTT-S International Microwave Symposium Digest",

note = "Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4) ; Conference date: 14-06-1993 Through 18-06-1993",

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Martens, JS, Lee, L, Char, K, Withers, R, Zhang, D, Hietala, VM, Tigges, CP & Zolper, J 1993, MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials. in IEEE MTT-S International Microwave Symposium Digest. IEEE MTT-S International Microwave Symposium Digest, vol. 3, Publ by IEEE, pp. 1243-1246, Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4), Atlanta, GA, USA, 14/06/93.

MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials. / Martens, J. S.; Lee, L.; Char, K. et al.
IEEE MTT-S International Microwave Symposium Digest. Publ by IEEE, 1993. p. 1243-1246 (IEEE MTT-S International Microwave Symposium Digest; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

AU - Martens, J. S.

AU - Lee, L.

AU - Char, K.

AU - Withers, R.

AU - Zhang, D.

AU - Hietala, V. M.

AU - Tigges, C. P.

AU - Zolper, J.

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AB - The confocal resonator is a tool for quick, accurate, non-invasive and flexible surface impedance measurements. From the frequency dependence of surface impedance, the vertical conductivity/permittivity profiles have been determined for a variety of devices and device materials including implanted Si and GaAs wafers and superconductor-dielectric interfaces. The vertical spatial resolution can be as small as several nm and accuracy of the complex permittivity generally is better than 3%.

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M3 - Conference contribution

AN - SCOPUS:0027150955

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T3 - IEEE MTT-S International Microwave Symposium Digest

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BT - IEEE MTT-S International Microwave Symposium Digest

PB - Publ by IEEE

T2 - Proceedings of the 1993 IEEE MTT-S International Symposium on Circuits and Systems, Part 4 (of 4)

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ER -

MM-wave confocal resonators for vertical structure profiling in semiconducting and superconducting materials

Abstract

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Conference

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