Microstructures and electrical properties of CaCu₃Ti ₄O₁₂ thin films on Pt/TiO₂/SiO₂/Si substrates by pulsed laser deposition

Engineering & Materials Science

• Pulsed laser deposition 100%
• Electric properties 68%
• Thin films 61%
• Substrates 45%
• Microstructure 43%
• Electron energy loss spectroscopy 29%
• Charge trapping 25%
• Auger electron spectroscopy 25%
• Electrodes 24%
• Dielectric films 23%
• Leakage currents 17%
• Energy dispersive spectroscopy 16%
• Permittivity 16%
• Temperature 6%

Physics & Astronomy

• pulsed laser deposition 61%
• electrical properties 47%
• microstructure 37%
• thin films 33%
• distribution (property) 20%
• electrodes 20%
• rutile 16%
• spectroscopy 16%
• Auger spectroscopy 16%
• electron spectroscopy 15%
• leakage 13%
• energy dissipation 12%
• trapping 12%
• electron energy 12%
• permittivity 11%
• conduction 10%
• temperature 4%
• energy 4%

Chemical Compounds

• Pulsed Laser Deposition 85%
• Electrical Property 54%
• Microstructure 43%
• Liquid Film 31%
• Leakage Current 21%
• Electron Energy Loss Spectroscopy 19%
• Auger Electron Spectroscopy 18%
• Energy-Dispersive Spectroscopy 17%
• Behavior as Electrode 16%
• Rutile 15%
• Dielectric Constant 14%
• Dielectric Material 14%
• Diffusion 9%