Micromachining of quartz with ultrashort laser pulses

H. Varel; D. Ashkenasi; A. Rosenfeld; M. Wähmer; E. E.B. Campbell

doi:10.1007/s003390050593

Micromachining of quartz with ultrashort laser pulses

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, E. E.B. Campbell

Department of Physics

Research output: Contribution to journal › Article › peer-review

262 Scopus citations

Abstract

Well-defined and highly reproducible channels of a few micrometres diameter and lengths of over 1 mm have been produced in quartz with laser pulses of 790 nm wavelength (Ti:sapphire) and pulse lengths of 100-200 fs. The channel depth can be controlled by the laser fluence and number of laser shots. Comparisons were made with laser pulse lengths of 1.3 ps, 2.8 ps, 30 ps, and 5 ns. The micromachining produced by the fs laser pulses was found to be much more controllable and reproducible than the longer pulses and produced much less damage in the material.

Original language	English
Pages (from-to)	367-373
Number of pages	7
Journal	Applied Physics A: Materials Science and Processing
Volume	65
Issue number	4-5
DOIs	https://doi.org/10.1007/s003390050593
State	Published - 1997

Access to Document

10.1007/s003390050593

Cite this

@article{a7cf04d341264169be3e9b1d83338200,

title = "Micromachining of quartz with ultrashort laser pulses",

abstract = "Well-defined and highly reproducible channels of a few micrometres diameter and lengths of over 1 mm have been produced in quartz with laser pulses of 790 nm wavelength (Ti:sapphire) and pulse lengths of 100-200 fs. The channel depth can be controlled by the laser fluence and number of laser shots. Comparisons were made with laser pulse lengths of 1.3 ps, 2.8 ps, 30 ps, and 5 ns. The micromachining produced by the fs laser pulses was found to be much more controllable and reproducible than the longer pulses and produced much less damage in the material.",

author = "H. Varel and D. Ashkenasi and A. Rosenfeld and M. W{\"a}hmer and Campbell, {E. E.B.}",

year = "1997",

doi = "10.1007/s003390050593",

language = "English",

volume = "65",

pages = "367--373",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

number = "4-5",

}

TY - JOUR

T1 - Micromachining of quartz with ultrashort laser pulses

AU - Varel, H.

AU - Ashkenasi, D.

AU - Rosenfeld, A.

AU - Wähmer, M.

AU - Campbell, E. E.B.

PY - 1997

Y1 - 1997

N2 - Well-defined and highly reproducible channels of a few micrometres diameter and lengths of over 1 mm have been produced in quartz with laser pulses of 790 nm wavelength (Ti:sapphire) and pulse lengths of 100-200 fs. The channel depth can be controlled by the laser fluence and number of laser shots. Comparisons were made with laser pulse lengths of 1.3 ps, 2.8 ps, 30 ps, and 5 ns. The micromachining produced by the fs laser pulses was found to be much more controllable and reproducible than the longer pulses and produced much less damage in the material.

AB - Well-defined and highly reproducible channels of a few micrometres diameter and lengths of over 1 mm have been produced in quartz with laser pulses of 790 nm wavelength (Ti:sapphire) and pulse lengths of 100-200 fs. The channel depth can be controlled by the laser fluence and number of laser shots. Comparisons were made with laser pulse lengths of 1.3 ps, 2.8 ps, 30 ps, and 5 ns. The micromachining produced by the fs laser pulses was found to be much more controllable and reproducible than the longer pulses and produced much less damage in the material.

UR - http://www.scopus.com/inward/record.url?scp=0031249383&partnerID=8YFLogxK

U2 - 10.1007/s003390050593

DO - 10.1007/s003390050593

M3 - Article

AN - SCOPUS:0031249383

SN - 0947-8396

VL - 65

SP - 367

EP - 373

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 4-5

ER -

Micromachining of quartz with ultrashort laser pulses

Abstract

Access to Document

Fingerprint

Cite this