Micromachining of quartz with ultrashort laser pulses

H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, E. E.B. Campbell

Research output: Contribution to journalArticlepeer-review

259 Scopus citations


Well-defined and highly reproducible channels of a few micrometres diameter and lengths of over 1 mm have been produced in quartz with laser pulses of 790 nm wavelength (Ti:sapphire) and pulse lengths of 100-200 fs. The channel depth can be controlled by the laser fluence and number of laser shots. Comparisons were made with laser pulse lengths of 1.3 ps, 2.8 ps, 30 ps, and 5 ns. The micromachining produced by the fs laser pulses was found to be much more controllable and reproducible than the longer pulses and produced much less damage in the material.

Original languageEnglish
Pages (from-to)367-373
Number of pages7
JournalApplied Physics A: Materials Science and Processing
Issue number4-5
StatePublished - 1997


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