@inproceedings{20f30263d86c4cdfb3bb870b50b618f6,
title = "Micromachined probe array for measurement of biological properties",
abstract = "This paper described the concept of a probe array for the measurement of biological properties and showed the implementation of a novel probe array for the biological measurement using MEMS technology. We experimentally show the feasibility of the micromachined probe array for biological application through this work. Many researchers have performed the dielectric measurement of liquids or biological samples using a single probe which is manufactured by laser machining. They should perform repetitive experiments point by point to obtain the biological properties of multiple points using a single probe. Moreover the size of single probe and Subminiature A (SMA) connector, which is connected with probe and test cable of network analyzer, are limited and the cost of probe and connector are very high. However, we could obtain the biological information of multiple points by one contact with a sample using the micromachined probe array at a time. Also we can reduce the size and cost of probe using wafer level process.",
keywords = "Biological information, MEMS, Permittivity measurement, Probe array",
author = "Kim, {Jung Mu} and Oh, {Dong Hoon} and Back, {Chang Wook} and Cho, {Jei Won} and Youngwoo Kwon and Changyul Cheon and Kim, {Yong Kweon}",
year = "2005",
doi = "10.1016/j.bbrc.2005.06.038",
language = "English",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "1234--1237",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}