Abstract
Electrical connections through microfabricated suspensions on a pneumatically pumped elastomer membrane were demonstrated. A method to fabricate the suspensions on the elastomer membrane was developed. The elastomer membrane was 1 mm in diameter and 120 μm in thickness. Resistances of the microfabricated suspensions measured across the elastomer membrane were within 1% difference when the membrane's center deflection ranged from 0 to 100 μm, which corresponded to a numerical aperture change from 0 to 0.2 as well as a 2.6% elongation of the elastomer.
Original language | English |
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Pages (from-to) | 6051-6053 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 85 |
Issue number | 24 |
DOIs | |
State | Published - 13 Dec 2004 |
Bibliographical note
Funding Information:This work is supported by Bio-Optic Synthetic System (BOSS) program under the Defensive Science Office (DSO), Defense Advanced Research Projects Agency (DARPA).