Abstract
This paper describes development of a micro confocal line scanning system for multiplexed biochip applications. The hybrid integration of ID MEMS microlens scanner and confocal pinhole, laser diodes, and photodiode allows to create handheld sized autonomous confocal excitation and detection microsystem. Without use of bulky external microscopes, we have successfully demonstrated laser induced fluorescent excitation and detection from multiple of microfluidic channels using the micro confocal line scanning system.
Original language | English |
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Title of host publication | 2003 IEEE/LEOS International Conference on Optical MEMS |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 10-11 |
Number of pages | 2 |
ISBN (Electronic) | 078037830X, 9780780378308 |
DOIs | |
State | Published - 2003 |
Event | 2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003 |
Publication series
Name | 2003 IEEE/LEOS International Conference on Optical MEMS |
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Conference
Conference | 2003 IEEE/LEOS International Conference on Optical MEMS |
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Country/Territory | United States |
City | Waikoloa |
Period | 18/08/03 → 21/08/03 |
Bibliographical note
Publisher Copyright:© 2003 IEEE.
Keywords
- Fluorescence
- Laser excitation
- Laser modes
- Lenses
- Microfluidics
- Micromechanical devices
- Microoptics
- Optical microscopy
- Photodiodes
- Surface emitting lasers