TY - JOUR
T1 - MEMS vibrational energy harvesters
AU - Toshiyoshi, Hiroshi
AU - Ju, Suna
AU - Honma, Hiroaki
AU - Ji, Chang Hyeon
AU - Fujita, Hiroyuki
N1 - Funding Information:
A part of this was supported by JST CREST [Grant Number JPMJCR15Q4], Japan. This study was also supported by the National Research Foundation of Korea funded by the Ministry of Science, ICT & Future Planning, 2015 [2014K1B1A1073720].
Publisher Copyright:
© 2019, © 2019 The Author(s). Published by Informa UK Limited, trading as Taylor & Francis Group.
PY - 2019/1/1
Y1 - 2019/1/1
N2 - In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.
AB - In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.
KW - 201 Electronics / Semiconductor / TCOs
KW - 206 Energy conversion / transport / storage / recovery
KW - 208 Sensors and actuators
KW - 400 Modeling / Simulations
KW - 60 New topics / Others
KW - MEMS
KW - energy harvester
KW - microelectro-mechanical system
KW - velocity-damped resonant generator
UR - http://www.scopus.com/inward/record.url?scp=85061745553&partnerID=8YFLogxK
U2 - 10.1080/14686996.2019.1569828
DO - 10.1080/14686996.2019.1569828
M3 - Review article
AN - SCOPUS:85061745553
VL - 20
SP - 124
EP - 143
JO - Science and Technology of Advanced Materials
JF - Science and Technology of Advanced Materials
SN - 1468-6996
IS - 1
ER -