MEMS vibrational energy harvesters

Hiroshi Toshiyoshi, Suna Ju, Hiroaki Honma, Chang Hyeon Ji, Hiroyuki Fujita

Research output: Contribution to journalReview articlepeer-review

104 Scopus citations


In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.

Original languageEnglish
Pages (from-to)124-143
Number of pages20
JournalScience and Technology of Advanced Materials
Issue number1
StatePublished - 1 Jan 2019

Bibliographical note

Publisher Copyright:
© 2019, © 2019 The Author(s). Published by Informa UK Limited, trading as Taylor & Francis Group.


  • 201 Electronics / Semiconductor / TCOs
  • 206 Energy conversion / transport / storage / recovery
  • 208 Sensors and actuators
  • 400 Modeling / Simulations
  • 60 New topics / Others
  • MEMS
  • energy harvester
  • microelectro-mechanical system
  • velocity-damped resonant generator


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