Materials science of Ru and Ru alloy thin films for barrier applications

  • Wen Liao
  • , Daniel Bost
  • , Chia Yun Chiu
  • , Gyeong S. Hwang
  • , John G. Ekerdt

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

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Engineering

Material Science

Chemical Engineering