Abstract
The machining characteristics of glass substrates containing chemical components were investigated for the purpose of femtosecond laser helical drilling. A femtosecond laser of wavelength 1552 nm and pulse duration 800 fs was adopted in the laser machining system. The substrates investigated were aluminosilicate, soda-lime, and borosilicate glass. The chemical components contained in each glass substrate were quantitatively analyzed by laser ablation-induced chemical plasma mass spectrometry. The characteristics of the drilling conditions for each glass substrate were affected by its chemical components. As the wt% of Al2O3 and MgO components in the glass substrates increased, the ablation threshold energy of each substrate decreased, resulting in greater vertical speed of the laser head.
Original language | English |
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Pages (from-to) | 375-385 |
Number of pages | 11 |
Journal | International Journal of Precision Engineering and Manufacturing - Green Technology |
Volume | 8 |
Issue number | 2 |
DOIs | |
State | Published - Mar 2021 |
Bibliographical note
Publisher Copyright:© 2020, Korean Society for Precision Engineering.
Keywords
- Femtosecond laser
- Glass
- Glass chemicals
- Helical drilling