Fingerprint
Dive into the research topics of 'Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing
Dongil Kim, Pilsung Kang, Sungzoon Cho, Hyoung Joo Lee, Seungyong Doh
Research output: Contribution to journal › Article › peer-review
99
Scopus
citations