Low-Temperature and High-Quality Growth of Bi2O2Se Layered Semiconductors via Cracking Metal-Organic Chemical Vapor Deposition

Minsoo Kang, Hyun Jun Chai, Han Beom Jeong, Cheolmin Park, In Young Jung, Eunpyo Park, Mert Miraç Çiçek, Injun Lee, Byeong Soo Bae, Engin Durgun, Joon Young Kwak, Seungwoo Song, Sung Yool Choi, Hu Young Jeong, Kibum Kang

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