Low Power Electromagnetic Scanning Micromirror for LiDAR System

Jeong Yeon Hwang, Jong Uk Bu, Chang Hyeon Ji

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed under the silicon substrate. A unique magnetic circuit that generates an asymmetric radial magnetic field has been designed and analyzed. A series-connected double spring-mass system consisting of a gimbal and a mirror plate has been used to amplify the deflection angle. An analytic model of the system has been developed and verified with finite element analysis. Also, a reinforcement rim structure is utilized to reduce the dynamic deformation of the reflective surface down to 19.3 nmrms. An optical scan angle of 30° is obtained at 690 Hz, 17.4 mArms input, and corresponding power consumption is 7.8 mWrms. A prototype scanning system with 180° × 30° field-of-view has been demonstrated with fabricated scanning micromirror as the vertical scanner. The proposed approach provides a simple and compact design for a large diameter scanning micromirror, which can potentially be utilized in various LiDAR applications.

Original languageEnglish
Article number9312151
Pages (from-to)7358-7366
Number of pages9
JournalIEEE Sensors Journal
Issue number6
StatePublished - 15 Mar 2021


  • dynamic deformation
  • electromagnetic actuation
  • light detection and ranging (LiDAR) system
  • Scanning micromirror


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