Low Power Electromagnetic Scanning Micromirror for LiDAR System

Jeong Yeon Hwang, Jong Uk Bu, Chang Hyeon Ji

Research output: Contribution to journalArticlepeer-review

17 Scopus citations


In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed under the silicon substrate. A unique magnetic circuit that generates an asymmetric radial magnetic field has been designed and analyzed. A series-connected double spring-mass system consisting of a gimbal and a mirror plate has been used to amplify the deflection angle. An analytic model of the system has been developed and verified with finite element analysis. Also, a reinforcement rim structure is utilized to reduce the dynamic deformation of the reflective surface down to 19.3 nmrms. An optical scan angle of 30° is obtained at 690 Hz, 17.4 mArms input, and corresponding power consumption is 7.8 mWrms. A prototype scanning system with 180° × 30° field-of-view has been demonstrated with fabricated scanning micromirror as the vertical scanner. The proposed approach provides a simple and compact design for a large diameter scanning micromirror, which can potentially be utilized in various LiDAR applications.

Original languageEnglish
Article number9312151
Pages (from-to)7358-7366
Number of pages9
JournalIEEE Sensors Journal
Issue number6
StatePublished - 15 Mar 2021

Bibliographical note

Funding Information:
Manuscript received November 23, 2020; revised December 29, 2020; accepted December 29, 2020. Date of publication January 1, 2021; date of current version February 17, 2021. This work was supported in part by the Technology Innovation Program (Development of low price 3D LiDAR for measurement of service robots in indoor and outdoor environment) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea) under Grant 20004015, in part by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and Future Planning under Grant 2017R1A2B4007830, and in part by the Convergent Technology R&D Program for Human Augmentation through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT under Grant NRF-2019M3C1B8090805. The associate editor coordinating the review of this article and approving it for publication was Prof. Guiyun Tian. (Corresponding author: Chang-Hyeon Ji.) Jeong-Yeon Hwang is with the Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, South Korea (e-mail: jeongyeon01@ewahin.net).

Publisher Copyright:
© 2001-2012 IEEE.


  • dynamic deformation
  • electromagnetic actuation
  • light detection and ranging (LiDAR) system
  • Scanning micromirror


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