@inproceedings{f4f7eb13aa544974b708c4030116f13e,
title = "Locally-separated vertical channel SONOS flash memory (LSVC SONOS) for multi-storage and multi-level operation",
abstract = "A SONOS flash memory having locally-separated vertical channels is investigated. The vertical SONOS flash memory has a scaling issue related with the fin width. As the fin width is shorter, electrical interference between paired cells (PCI) is severer. To overcome PCI, we propose the locally-separated vertical channel SONOS (LSVC SONOS) structure. We demonstrate reliable operation of LSVC SONOS using ATLAS simulation. This device structure is promising for multi-storage and multi-level operation.",
author = "Yoon Kim and Yun, \{Jang Gn\} and Park, \{Il Han\} and Seongjae Cho and Lee, \{Jung Hoon\} and Park, \{Se Hwan\} and Lee, \{Dong Hua\} and Kim, \{Doo Hyun\} and Lee, \{Gil Sung\} and Sim, \{Won Bo\} and Lee, \{Jong Duk\} and Park, \{Byung Gook\}",
year = "2008",
doi = "10.1109/SNW.2008.5418389",
language = "English",
isbn = "9781424420711",
series = "IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008",
booktitle = "IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008",
note = "IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 ; Conference date: 15-06-2008 Through 16-06-2008",
}