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Line-shaped superconducting nbn thin film on a silicon oxide substrate
Jeong Gyun Kim
,
Dongseok Suh
, Haeyong Kang
Department of Physics
Research output
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peer-review
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Material Science
Silicon
100%
Oxide Compound
100%
Thin Films
100%
Superconducting Film
66%
Nitride Compound
66%
Niobium
66%
Density
33%
Film
33%
Reactive Ion Etching
33%