Latchable electromagnetic 2×2 MEMS optical switch

Chang Hyeon Ji; Youngjoo Yee; Junghoon Choi; Hyun Ho Oh; Jong Uk Bu

Latchable electromagnetic 2×2 MEMS optical switch

Chang Hyeon Ji, Youngjoo Yee, Junghoon Choi, Hyun Ho Oh, Jong Uk Bu

Electronic and Electrical Engineering

Research output: Contribution to conference › Paper › peer-review

6 Scopus citations

Abstract

This paper presents the design, fabrication process and measurement results of a 2×2 MEMS optical switch. The switch comprises of an electromagnet and lensed fibers assembled with a micromachined movable vertical micromirror. At a wavelength of 1550nm, the insertion loss of 0.2-0.8dB and the polarization dependent loss (PDL) of 0.02-0.2dB are measured. The switching time is 1ms. Novel method of realizing latchable optical switch using electromagnetic actuator is also provided and verified. The optical switch utilizes straw-cutter-like rotational motion of the shutter mirror compared to the comb-driven linear actuation achieved by the electrostatic force [1]. The latching mechanism is based on the latchability of the electro-permanent magnet instead of the conventional arch-shaped mechanical leaf springs [2].

Original language	English
Pages	239-242
Number of pages	4
State	Published - 2003
Event	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: 19 Jan 2003 → 23 Jan 2003

Conference

Conference	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
Country/Territory	Japan
City	Kyoto
Period	19/01/03 → 23/01/03

Cite this

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title = "Latchable electromagnetic 2×2 MEMS optical switch",

abstract = "This paper presents the design, fabrication process and measurement results of a 2×2 MEMS optical switch. The switch comprises of an electromagnet and lensed fibers assembled with a micromachined movable vertical micromirror. At a wavelength of 1550nm, the insertion loss of 0.2-0.8dB and the polarization dependent loss (PDL) of 0.02-0.2dB are measured. The switching time is 1ms. Novel method of realizing latchable optical switch using electromagnetic actuator is also provided and verified. The optical switch utilizes straw-cutter-like rotational motion of the shutter mirror compared to the comb-driven linear actuation achieved by the electrostatic force [1]. The latching mechanism is based on the latchability of the electro-permanent magnet instead of the conventional arch-shaped mechanical leaf springs [2].",

author = "Ji, {Chang Hyeon} and Youngjoo Yee and Junghoon Choi and Oh, {Hyun Ho} and Bu, {Jong Uk}",

year = "2003",

language = "English",

pages = "239--242",

note = "IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems ; Conference date: 19-01-2003 Through 23-01-2003",

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TY - CONF

T1 - Latchable electromagnetic 2×2 MEMS optical switch

AU - Ji, Chang Hyeon

AU - Yee, Youngjoo

AU - Choi, Junghoon

AU - Oh, Hyun Ho

AU - Bu, Jong Uk

PY - 2003

Y1 - 2003

N2 - This paper presents the design, fabrication process and measurement results of a 2×2 MEMS optical switch. The switch comprises of an electromagnet and lensed fibers assembled with a micromachined movable vertical micromirror. At a wavelength of 1550nm, the insertion loss of 0.2-0.8dB and the polarization dependent loss (PDL) of 0.02-0.2dB are measured. The switching time is 1ms. Novel method of realizing latchable optical switch using electromagnetic actuator is also provided and verified. The optical switch utilizes straw-cutter-like rotational motion of the shutter mirror compared to the comb-driven linear actuation achieved by the electrostatic force [1]. The latching mechanism is based on the latchability of the electro-permanent magnet instead of the conventional arch-shaped mechanical leaf springs [2].

AB - This paper presents the design, fabrication process and measurement results of a 2×2 MEMS optical switch. The switch comprises of an electromagnet and lensed fibers assembled with a micromachined movable vertical micromirror. At a wavelength of 1550nm, the insertion loss of 0.2-0.8dB and the polarization dependent loss (PDL) of 0.02-0.2dB are measured. The switching time is 1ms. Novel method of realizing latchable optical switch using electromagnetic actuator is also provided and verified. The optical switch utilizes straw-cutter-like rotational motion of the shutter mirror compared to the comb-driven linear actuation achieved by the electrostatic force [1]. The latching mechanism is based on the latchability of the electro-permanent magnet instead of the conventional arch-shaped mechanical leaf springs [2].

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M3 - Paper

AN - SCOPUS:0038156077

SP - 239

EP - 242

T2 - IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Y2 - 19 January 2003 through 23 January 2003

ER -

Latchable electromagnetic 2×2 MEMS optical switch

Abstract

Conference

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