This paper presents the design, fabrication process and measurement results of a 2×2 MEMS optical switch. The switch comprises of an electromagnet and lensed fibers assembled with a micromachined movable vertical micromirror. At a wavelength of 1550nm, the insertion loss of 0.2-0.8dB and the polarization dependent loss (PDL) of 0.02-0.2dB are measured. The switching time is 1ms. Novel method of realizing latchable optical switch using electromagnetic actuator is also provided and verified. The optical switch utilizes straw-cutter-like rotational motion of the shutter mirror compared to the comb-driven linear actuation achieved by the electrostatic force . The latching mechanism is based on the latchability of the electro-permanent magnet instead of the conventional arch-shaped mechanical leaf springs .
|Number of pages
|Published - 2003
|IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 19 Jan 2003 → 23 Jan 2003
|IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
|19/01/03 → 23/01/03