Latchable electromagnetic 2×2 MEMS optical switch

Chang Hyeon Ji, Youngjoo Yee, Junghoon Choi, Hyun Ho Oh, Jong Uk Bu

Research output: Contribution to conferencePaperpeer-review

6 Scopus citations


This paper presents the design, fabrication process and measurement results of a 2×2 MEMS optical switch. The switch comprises of an electromagnet and lensed fibers assembled with a micromachined movable vertical micromirror. At a wavelength of 1550nm, the insertion loss of 0.2-0.8dB and the polarization dependent loss (PDL) of 0.02-0.2dB are measured. The switching time is 1ms. Novel method of realizing latchable optical switch using electromagnetic actuator is also provided and verified. The optical switch utilizes straw-cutter-like rotational motion of the shutter mirror compared to the comb-driven linear actuation achieved by the electrostatic force [1]. The latching mechanism is based on the latchability of the electro-permanent magnet instead of the conventional arch-shaped mechanical leaf springs [2].

Original languageEnglish
Number of pages4
StatePublished - 2003
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 19 Jan 200323 Jan 2003


ConferenceIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems


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