Laser-induced microstructuring of dielectrics using ultrashort laser pulses

D. Ashkenasi, A. Rosenfeld, H. Varel, E. E.B. Campbell

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations


The possibility of producing controllable and well-defined microstructures in transparent materials by means of pulsed laser ablation was investigated using a Ti:sapphire laser. The chirped-pulse-amplification (CPA) technique allowed the variation of the pulse width without changing other parameters. Thin channels of a diameter of 21 μm were drilled throughout the dielectric samples. Microholes were produced on the back surface of the transparent materials by lowering the fluence below the multiple shot surface damage threshold. Processing techniques based on nonlinear optical effects could enable a more straightforward manufacturing of precise 3D microstructures in transparent materials for important technological applications.

Original languageEnglish
Pages (from-to)161
Number of pages1
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 1997
EventProceedings of the 1997 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, USA
Duration: 18 May 199723 May 1997


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