Laser ablation of dielectrics with temporally shaped femtosecond pulses

R. Stoian; M. Boyle; A. Thoss; A. Rosenfeld; G. Korn; I. V. Hertel; E. E.B. Campbell

doi:10.1063/1.1432747

Laser ablation of dielectrics with temporally shaped femtosecond pulses

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E.B. Campbell

Department of Physics

Research output: Contribution to journal › Article › peer-review

205 Scopus citations

Abstract

A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process.

Original language	English
Pages (from-to)	353-355
Number of pages	3
Journal	Applied Physics Letters
Volume	80
Issue number	3
DOIs	https://doi.org/10.1063/1.1432747
State	Published - 21 Jan 2002

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title = "Laser ablation of dielectrics with temporally shaped femtosecond pulses",

abstract = "A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process.",

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AU - Boyle, M.

AU - Thoss, A.

AU - Rosenfeld, A.

AU - Korn, G.

AU - Hertel, I. V.

AU - Campbell, E. E.B.

PY - 2002/1/21

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AB - A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process.

UR - https://www.scopus.com/pages/publications/79956037152

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DO - 10.1063/1.1432747

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 3

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Laser ablation of dielectrics with temporally shaped femtosecond pulses

Abstract

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