Laser ablation of dielectrics with temporally shaped femtosecond pulses

R. Stoian; M. Boyle; A. Thoss; A. Rosenfeld; G. Korn; I. V. Hertel; E. E.B. Campbell

doi:10.1063/1.1432747

Laser ablation of dielectrics with temporally shaped femtosecond pulses

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E.B. Campbell

Department of Physics

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197 Scopus citations

Abstract

A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process.

Original language	English
Pages (from-to)	353-355
Number of pages	3
Journal	Applied Physics Letters
Volume	80
Issue number	3
DOIs	https://doi.org/10.1063/1.1432747
State	Published - 21 Jan 2002

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AU - Korn, G.

AU - Hertel, I. V.

AU - Campbell, E. E.B.

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Laser ablation of dielectrics with temporally shaped femtosecond pulses

Abstract

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