Laser ablation of dielectrics with temporally shaped femtosecond pulses

R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, E. E.B. Campbell

Research output: Contribution to journalArticlepeer-review

184 Scopus citations

Abstract

A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process.

Original languageEnglish
Pages (from-to)353-355
Number of pages3
JournalApplied Physics Letters
Volume80
Issue number3
DOIs
StatePublished - 21 Jan 2002

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