A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process.
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - 21 Jan 2002|