Abstract
0.85Bi 0.5Na 0.5TiO 3-0.15Bi 0.5K 0.5TiO 3 (BNKT15) lead-free thin films were prepared on Pt(111)/TiO 2/SiO 2/Si(100) substrates by the chemical solution deposition method. BNKT15 are MPB composition in the Bi 0.5Na 0.5TiO 3-Bi 0.5K 0.5TiO 3 (BNT-BKT) system. The maximum piezoelectric coefficient (d 33,f) value of BNKT15 thin film is approximately 75 pm/V, which is comparable to that of polycrystalline PZT thin films. These results suggest that BNKT15 thin film can be used as an alternative for PZT films in piezoelectric micro-electromechanical systems.
Original language | English |
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Pages (from-to) | 903-907 |
Number of pages | 5 |
Journal | Current Applied Physics |
Volume | 12 |
Issue number | 3 |
DOIs | |
State | Published - May 2012 |
Bibliographical note
Funding Information:This work was supported by the development program of local science park funded by the ULSAN Metropolitan City and the MEST (Ministry of Education, Science and Technology).
Keywords
- Bismuth sodium titanate
- Ferroelectric
- Lead-free
- Piezoelectric
- Thin film