0.85Bi 0.5Na 0.5TiO 3-0.15Bi 0.5K 0.5TiO 3 (BNKT15) lead-free thin films were prepared on Pt(111)/TiO 2/SiO 2/Si(100) substrates by the chemical solution deposition method. BNKT15 are MPB composition in the Bi 0.5Na 0.5TiO 3-Bi 0.5K 0.5TiO 3 (BNT-BKT) system. The maximum piezoelectric coefficient (d 33,f) value of BNKT15 thin film is approximately 75 pm/V, which is comparable to that of polycrystalline PZT thin films. These results suggest that BNKT15 thin film can be used as an alternative for PZT films in piezoelectric micro-electromechanical systems.
Bibliographical noteFunding Information:
This work was supported by the development program of local science park funded by the ULSAN Metropolitan City and the MEST (Ministry of Education, Science and Technology).
- Bismuth sodium titanate
- Thin film