Abstract
We have designed, fabricated, and demonstrated large vertical displacement vertical microlens scanners with low (<10 V) driving voltage using silicon-on-insulator technology. The unique isolated and pre-engaged vertical comb-drive sets and the coupled-torsion flexure design provide both upward and downward piston motions, as well as low driving voltages. Single-directional devices demonstrate maximum static downward displacement of 8 μm at 10 Vdc. Bidirectional devices demonstrate vertical actuation from -6.5 to +9 μm at max 12 Vdc, and a vertical displacement of up to 55 μm peak-to-peak is achieved at the resonance near 400 Hz. The lens motion shows piston motion with a small tilt angle of less than 0.034° and the compensation of the tilt using an isolated comb bank is demonstrated.
Original language | English |
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Pages (from-to) | 1572-1574 |
Number of pages | 3 |
Journal | IEEE Photonics Technology Letters |
Volume | 14 |
Issue number | 11 |
DOIs | |
State | Published - Nov 2002 |
Keywords
- Integrated optics
- Microlens scanner
- Microoptics
- Microoptoelectromechanical systems
- Silicon-on-insulator
- Variable focus
- Vertical comb-drive