Large-displacement vertical microlens scanner with low driving voltage

Sunghoon Kwon, Veljko Milanović, Luke P. Lee

Research output: Contribution to journalArticlepeer-review

73 Scopus citations


We have designed, fabricated, and demonstrated large vertical displacement vertical microlens scanners with low (<10 V) driving voltage using silicon-on-insulator technology. The unique isolated and pre-engaged vertical comb-drive sets and the coupled-torsion flexure design provide both upward and downward piston motions, as well as low driving voltages. Single-directional devices demonstrate maximum static downward displacement of 8 μm at 10 Vdc. Bidirectional devices demonstrate vertical actuation from -6.5 to +9 μm at max 12 Vdc, and a vertical displacement of up to 55 μm peak-to-peak is achieved at the resonance near 400 Hz. The lens motion shows piston motion with a small tilt angle of less than 0.034° and the compensation of the tilt using an isolated comb bank is demonstrated.

Original languageEnglish
Pages (from-to)1572-1574
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number11
StatePublished - Nov 2002


  • Integrated optics
  • Microlens scanner
  • Microoptics
  • Microoptoelectromechanical systems
  • Silicon-on-insulator
  • Variable focus
  • Vertical comb-drive


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