Interaction of neutral vacancies and interstitials with the Si(001) surface

Taras A. Kirichenko, Sanjay K. Banerjee, Gyeong S. Hwang

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17 Scopus citations


The interaction of neutral vacancies and interstitials with the clean Si(001) surface is studied using density functional theory calculations within the generalized gradient approximation. We find both vacancies and interstitials within topmost three subsurface layers are significantly stabilized by their strong interactions with the surface. Their formation energies are predicted to be a few eV lower than those at the bulk. This study suggests that a large fraction of neutral interstitials may reside in the subsurface layers. However, most vacancies will eventually remain in the form of missing, dimers due to their significant formation energy difference. Along with structure and energetics, we analyze bonding of vacancies and interstitials based on electron density and electron localization function topologies. We also show the diffusion pathways and barriers of vacancies on the surface and at the subsurface layers.

Original languageEnglish
Article number045321
Pages (from-to)045321-1-045321-7
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number4
StatePublished - Jul 2004

Bibliographical note

Funding Information:
G.S.H. acknowledges the Welch Foundation (Grant No. F-1535) for their partial financial support. Our calculations were performed using supercomputers in the Texas Advanced computing center at UT-Austin.


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