Inductively coupled plasma etching of (Ba,Sr)TiO3 thin films

H. M. Lee, D. C. Kim, W. Jo, K. Y. Kim

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Fingerprint

Dive into the research topics of 'Inductively coupled plasma etching of (Ba,Sr)TiO3 thin films'. Together they form a unique fingerprint.

Engineering

Physics

Material Science