Improved contact properties of single-walled carbon nanotube on p-AlGaN layers after microwave post-treatment

Kyeong Heon Kim, Min Ju Yun, Sungho Kim, Hee Dong Kim

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Abstract

We present improved contact and transparent properties of single-walled carbon nanotube (SWNT) transparent conductive electrodes (TCEs) on the p-AlGaN layer via a post microwave treatment (MWT) method. As a result, the contact resistance of the MWT-SWNT TCEs was observed to be 9.7 × 10-2 Ω·cm2, which was 26.5% lower than that of pristine sample, while the transmittance is improved by 1.6% (at the wavelengths of 365 nm) after the MWT. In addition, the results of material and chemical analyses show that these improvements might contribute to the reduction in the Schottky barrier height between the TCE and the p-AlGaN layer, through both a generation of Ga vacancies in p-AlGaN interface and a decrease of oxygen vacancies that can increase hole concentration in SWNTs.

Original languageEnglish
Article number123471
JournalMaterials Chemistry and Physics
Volume252
DOIs
StatePublished - 15 Sep 2020

Bibliographical note

Publisher Copyright:
© 2020

Keywords

  • Microwave treatment method
  • Single-wall carbon nanotube
  • Transparent conductive electrodes

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