Abstract
 Objective:In this paper, the fabrication of perfluoro-alkoxy alkane (PFA) film-based planar neural electrodes was proposed. Methods: The fabrication of PFA-based electrodes started with cleaning of PFA film. The argon plasma pretreatment was performed on the PFA film surface and attached to a dummy silicon wafer. Metal layers were deposited and patterned using the standard Micro Electro Mechanical Systems (MEMS) process. Electrode-sites and pads were opened using reactive ion etching (RIE). Lastly, the electrode patterned PFA substrate film was thermally laminated with the other bare PFA film. Electrical-physical evaluation tests were conducted along with <italic>in vitro</italic> tests, <italic>ex vivo</italic> tests and soak tests to evaluate the electrode performance and biocompatibility. Results: The electrical and physical performance of PFA-based electrodes had better performances compared to other biocompatible polymer-based electrodes. Also, the biocompatibility and longevity were verified by cytotoxicity test, elution test, and accelerated life test. Conclusion: The PFA film-based planar neural electrode fabrication was established and evaluated. The PFA based electrodes showed excellent benefits such as long-term reliability, low water absorption rate, and flexibility using the neural electrode. Significance: For implantable neural electrodes, hermetic sealing is required for <italic>in vivo</italic> durability. PFA fulfilled a low water absorption rate with relatively low Young's modulus to increase the longevity and biocompatibility of the devices.
Original language | English |
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Pages (from-to) | 1-11 |
Number of pages | 11 |
Journal | IEEE Transactions on Biomedical Engineering |
DOIs | |
State | Accepted/In press - 2023 |
Keywords
- Electrodes
- Etching
- Fabrication
- Fluoropolymer
- Implantable neural electrodes
- Metals
- neural prosthesis
- Perfluoro alkoxyalkane
- Plasmas
- Plastics
- Radio frequency