High speed flash memory and 1T-DRAM on dopant segregated schottky barrier (DSSB) FinFET SONOS device for multi-functional SoC applications

  • Sung Jin Choi
  • , Jin Woo Han
  • , Sungho Kim
  • , Dong Hyun Kim
  • , Moon Gyu Jang
  • , Jong Heon Yang
  • , Jin Soo Kim
  • , Kwang Hee Kim
  • , Gi Sung Lee
  • , Jae Sub Oh
  • , Myeong Ho Song
  • , Yun Chang Park
  • , Jeoung Woo Kim
  • , Yang Kyu Choi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

17 Scopus citations

Abstract

A novel dopant segregated Schottky barrier (DSSB) FinFET SONOS device is demonstrated in terms of multifunctioning in a high speed NAND-type Flash memory and capacitorless 1T-DRAM. In addition, a novel program mechanism that uses energy band engineered hot electrons (EBEHE) energized by sharp energy band bending at the edge of source/drain (S/D) is proposed for a high speed Flash memory programming operation. A short program time of 100ns and a low program voltage of 12V yield a Vth shift of 3.5V and a retention time exceeding 10years. For multifunctioning, the operation of a capacitorless 1T-DRAM is also demonstrated with a partially silicided DSSB in the same device.

Original languageEnglish
Title of host publication2008 IEEE International Electron Devices Meeting, IEDM 2008
DOIs
StatePublished - 2008
Event2008 IEEE International Electron Devices Meeting, IEDM 2008 - San Francisco, CA, United States
Duration: 15 Dec 200817 Dec 2008

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Conference

Conference2008 IEEE International Electron Devices Meeting, IEDM 2008
Country/TerritoryUnited States
CitySan Francisco, CA
Period15/12/0817/12/08

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