High-resolution patterning of aluminum thin films with a water-mediated transfer process

Byoung H. Lee, Yeon H. Cho, Haiwon Lee, Ki Dong Lee, Sang H. Kim, Myung M. Sung

Research output: Contribution to journalArticlepeer-review

38 Scopus citations

Abstract

Several scientists have developed a new method, called nanotransfer printing (nTP), based on a water-mediated transfer process for performing high-resolution patterning of aluminum thin films. A poly(dimethylsiloxane) (PDMS) stamp was fabricated and coated by an octadecylsiloxane SAM, which served as a release layer. An Al thin film was uniformly evaporated onto the patterned SAM-coated stamp. The SAM layer ensured weak adhesion between the deposited Al and and the stamp, enabling the facile and complete release of the Al from the stamp. The stamp was brought into contact with a substrate surface covered with by a thin water layer. It was observed that after drying, separation of the stamp from the completed the pattern-transfer process.

Original languageEnglish
Pages (from-to)1714-1718
Number of pages5
JournalAdvanced Materials
Volume19
Issue number13
DOIs
StatePublished - 2 Jul 2007

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