High rate in situ YBa2Cu3O7 film growth assisted by liquid phase

T. Ohnishi, J. U. Huh, R. H. Hammond, W. Jo

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21 Scopus citations


High-rate (10 nm/s) in situ YBa2Cu3O7 (YBCO) film growth was demonstrated by molecular beam epitaxy with electron beam co-evaporation at a system pressure of approximately 5 times; 10-5 Torr. To explain the phase stability observed, it is suggested that activated oxygen is generated in the process. Growth of very good YBCO, with a Jc of more than 2 MA/cm2, is possible at this very high rate because the growth is in a liquid (Ba-Cu-O), which forms along with the YBCO epitaxy. This liquid seems essential for high Jc-YBCO film growth at very high in situ growth rates and may be essential for all high-rate processes, including postanneal ex situ processes.

Original languageEnglish
Pages (from-to)977-981
Number of pages5
JournalJournal of Materials Research
Issue number4
StatePublished - Apr 2004


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