Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems

J. Alex Chediak, Zhongsheng Luo, Jeonggi Seo, Nathan Cheung, Luke P. Lee, Timothy D. Sands

Research output: Contribution to journalConference articlepeer-review

116 Scopus citations


Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel "pixel-to-point" laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number1
StatePublished - 1 Mar 2004
EventMicromechanics Section of Sensors and Actuators, based on - Kyoto, Japan
Duration: 19 Jan 200323 Jan 2003

Bibliographical note

Funding Information:
Brian E. McCandless of the University of Delaware graciously provided many samples of thin film CdS on Eric J. Carleton provided assistance regarding PLD. This work was supported by NSF (DMI-0088145).


  • Fluorescence detection
  • Heterogeneous integration
  • Microsystem
  • Optical thin film filter
  • Pixel-to-point transfer


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