Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel "pixel-to-point" laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems.
|Number of pages||7|
|Journal||Sensors and Actuators, A: Physical|
|State||Published - 1 Mar 2004|
|Event||Micromechanics Section of Sensors and Actuators, based on - Kyoto, Japan|
Duration: 19 Jan 2003 → 23 Jan 2003
Bibliographical noteFunding Information:
Brian E. McCandless of the University of Delaware graciously provided many samples of thin film CdS on Eric J. Carleton provided assistance regarding PLD. This work was supported by NSF (DMI-0088145).
- Fluorescence detection
- Heterogeneous integration
- Optical thin film filter
- Pixel-to-point transfer