Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems

J. Alex Chediak; Zhongsheng Luo; Jeonggi Seo; Nathan Cheung; Luke P. Lee; Timothy D. Sands

doi:10.1016/j.sna.2003.10.015

Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems

J. Alex Chediak, Zhongsheng Luo, Jeonggi Seo, Nathan Cheung, Luke P. Lee, Timothy D. Sands

Department of Chemistry & Nanoscience

Research output: Contribution to journal › Conference article › peer-review

118 Scopus citations

Abstract

Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel "pixel-to-point" laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems.

Original language	English
Pages (from-to)	1-7
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	111
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2003.10.015
State	Published - 1 Mar 2004
Event	Micromechanics Section of Sensors and Actuators, based on - Kyoto, Japan Duration: 19 Jan 2003 → 23 Jan 2003

Bibliographical note

Funding Information:
Brian E. McCandless of the University of Delaware graciously provided many samples of thin film CdS on Eric J. Carleton provided assistance regarding PLD. This work was supported by NSF (DMI-0088145).

Keywords

Fluorescence detection
Heterogeneous integration
Microsystem
Optical thin film filter
Pixel-to-point transfer

Access to Document

10.1016/j.sna.2003.10.015

Cite this

@article{8f354412c8d5462780eead6058a5292b,

title = "Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems",

abstract = "Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel {"}pixel-to-point{"} laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems.",

keywords = "Fluorescence detection, Heterogeneous integration, Microsystem, Optical thin film filter, Pixel-to-point transfer",

author = "{Alex Chediak}, J. and Zhongsheng Luo and Jeonggi Seo and Nathan Cheung and Lee, {Luke P.} and Sands, {Timothy D.}",

note = "Funding Information: Brian E. McCandless of the University of Delaware graciously provided many samples of thin film CdS on Eric J. Carleton provided assistance regarding PLD. This work was supported by NSF (DMI-0088145). ; Micromechanics Section of Sensors and Actuators, based on ; Conference date: 19-01-2003 Through 23-01-2003",

year = "2004",

month = mar,

day = "1",

doi = "10.1016/j.sna.2003.10.015",

language = "English",

volume = "111",

pages = "1--7",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems

AU - Alex Chediak, J.

AU - Luo, Zhongsheng

AU - Seo, Jeonggi

AU - Cheung, Nathan

AU - Lee, Luke P.

AU - Sands, Timothy D.

N1 - Funding Information: Brian E. McCandless of the University of Delaware graciously provided many samples of thin film CdS on Eric J. Carleton provided assistance regarding PLD. This work was supported by NSF (DMI-0088145).

PY - 2004/3/1

Y1 - 2004/3/1

N2 - Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel "pixel-to-point" laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems.

AB - Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel "pixel-to-point" laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems.

KW - Fluorescence detection

KW - Heterogeneous integration

KW - Microsystem

KW - Optical thin film filter

KW - Pixel-to-point transfer

UR - http://www.scopus.com/inward/record.url?scp=0442327417&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2003.10.015

DO - 10.1016/j.sna.2003.10.015

M3 - Conference article

AN - SCOPUS:0442327417

SN - 0924-4247

VL - 111

SP - 1

EP - 7

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1

T2 - Micromechanics Section of Sensors and Actuators, based on

Y2 - 19 January 2003 through 23 January 2003

ER -

Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems

Abstract

Bibliographical note

Keywords

Access to Document

Fingerprint

Cite this