Growth of ultrathin films of amorphous ruthenium-phosphorus alloys using a single source CVD precursor

Jinhong Shin, Abdul Waheed, Kyriacos Agapiou, Wyatt A. Winkenwerder, Hyun Wu Kim, Richard A. Jones, Gyeong S. Hwang, John G. Ekerdt

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

Thin films (∼30 nm) of amorphous RuP alloys (P ∼ 15-20%) can be grown by CVD from the single source precursor cis-H2Ru(PMe3)4 at 250-300 °C and 200 mTorr pressure on native SiO2.

Original languageEnglish
Pages (from-to)16510-16511
Number of pages2
JournalJournal of the American Chemical Society
Volume128
Issue number51
DOIs
StatePublished - 27 Dec 2006

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