Growth of silicon oxide in thin film block copolymer scaffolds

Dong Ha Kim, Xinqiao Jia, Zhiqun Lin, Kathryn W. Guarini, Thomas P. Russell

Research output: Contribution to journalArticlepeer-review

63 Scopus citations

Abstract

Thin films of asymmetric diblock copolymers have been used as scaffolds to define an ordered array of nanometer-scale reaction vessels in which High density arrays of silicon oxide nanostructures (see Figure) are produced by exposure to silicon tetrachloride. Such site-specific silicon oxide nanostructures could have widespread uses for sensory and optoelectronic applications.

Original languageEnglish
Pages (from-to)702-706
Number of pages5
JournalAdvanced Materials
Volume16
Issue number8
DOIs
StatePublished - 19 Apr 2004

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