Growth of individual vertically aligned nanotubes/ nanofibers with small diameter by PECVD on different metal underlayers

M. S. Kabir, R. E. Moijan, K. Svensson, O. A. Nerushev, P. Lundgren, S. Bengtsson, P. Enokson, E. E.B. Campbell

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The primary goal of this work is to achieve significant improvement of growth of carbon nanotubes (CNTs)/ carbon nanofibers (CNFs) on different metal underlayers that can provide a platform for electronic companies to adopt the technology into their existing manufacturing pipeline. In order to meet the requirements we have exploited a crucial component, inclusion of amorphous Si, as a buffer layer between the catalysts and the metal substrates to facilitate the growth of carbon nanotubes/fibers. Here we present some of the results on growth of carbon nanostructures on different metal underlayers for three different catalyst configurations: as film, as metal stripes and as dots of catalysts. Electrical characteristics of the grown structures as measured by STM are also addressed.

Original languageEnglish
Title of host publication2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings
EditorsM. Laudon, B. Romanowicz
Pages175-178
Number of pages4
StatePublished - 2005
Event2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 - Anaheim, CA, United States
Duration: 8 May 200512 May 2005

Publication series

Name2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Conference

Conference2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005
Country/TerritoryUnited States
CityAnaheim, CA
Period8/05/0512/05/05

Keywords

  • Cnf
  • Cnt
  • Ebl
  • Pecvd
  • Stm
  • Vacnt

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