Graphene nano-electromechanical mass sensor with high resolution at room temperature

Dong Hoon Shin, Hakseong Kim, Sung Hyun Kim, Hyeonsik Cheong, Peter G. Steeneken, Chirlmin Joo, Sang Wook Lee

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

The inherent properties of 2D materials—light mass, high out-of-plane flexibility, and large surface area—promise great potential for precise and accurate nanomechanical mass sensing, but their application is often hampered by surface contamination. Here we demonstrate a tri-layer graphene nanomechanical resonant mass sensor with sub-attogram resolution at room temperature, fabricated by a bottom-up process. We found that Joule-heating is effective in cleaning the graphene membrane surface, which results in a large improvement in the stability of the resonance frequency. We characterized the sensor by depositing Cr metal using a stencil mask and found a mass-resolution that is sufficient to weigh very small particles, like large proteins and protein complexes, with potential applications in the fields of nanobiology and medicine.

Original languageEnglish
Article number105958
JournaliScience
Volume26
Issue number2
DOIs
StatePublished - 17 Feb 2023

Bibliographical note

Funding Information:
S.W.L. and C.J. were supported by Human Frontier Science Program ( RGP00026/2019 ). S.W.L was supported by the Basic Science Research Program ( NRF-2022R1A2B5B01001640 , NRF-2021R1A6A1A10039823 ) and Global Research and Development Center Program ( NRF-2018K1A4A3A01064272 ) through the National Research Foundation of Korea ( NRF ). P.G.S. acknowledges funding from the European Union’s Horizon 2020 research and innovation program under grant agreement number 881603 (Graphene Flagship). D.H.S acknowledges support from Basic Science Research Program ( NRF-2017R1D1A1B03035727 ) through the National Research Foundation of Korea funded by the Ministry of Education and the KIND fellowship program at the Kavli Institute of Nanoscience Delft .

Funding Information:
S.W.L. and C.J. were supported by Human Frontier Science Program (RGP00026/2019). S.W.L was supported by the Basic Science Research Program (NRF-2022R1A2B5B01001640, NRF-2021R1A6A1A10039823) and Global Research and Development Center Program (NRF-2018K1A4A3A01064272) through the National Research Foundation of Korea (NRF). P.G.S. acknowledges funding from the European Union's Horizon 2020 research and innovation program under grant agreement number 881603 (Graphene Flagship). D.H.S acknowledges support from Basic Science Research Program (NRF-2017R1D1A1B03035727) through the National Research Foundation of Korea funded by the Ministry of Education and the KIND fellowship program at the Kavli Institute of Nanoscience Delft. D.H.S. H.K. and S.W.L. conceived the study. H.K. and D.H.S. obtained and analyzed the data. D.H.S. H.K. S.H.K. H.C. C.J. P.G.S. and S.W.L. discussed the data and wrote the manuscript. The authors declare no competing interests.

Publisher Copyright:
© 2023 The Author(s)

Keywords

  • Materials class
  • Nanomaterials
  • Sensor

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