Giant and stable conductivity switching behaviors in ZrO2 films deposited by pulsed laser depositions

  • Soohong Kim
  • , Iksu Byun
  • , Inrok Hwang
  • , Jinsoo Kim
  • , Jinsik Choi
  • , Bae Ho Park
  • , Sunae Seo
  • , Myoung Jae Lee
  • , David H. Seo
  • , Dong Seok Suh
  • , Yong Soo Joung
  • , In Kyeong Yoo

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

ZrO2 films have been deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition methods. Giant and stable conductivity switching behaviors with maximum on/off ratio of 106 and switching endurance of 105 times are observed in a typical Pt/ZrO 2/Pt structure. The Pt/ZrO2/Pt structure exhibits two ohmic behaviors in the low-voltage region (V < 1.4V) depending on the value of previously applied voltage and Schottky-type conduction in the high-voltage region (1.4V < V < 8.9 V). It seems that the conductivity switching behaviors result from the changes in both the Schottky barrier and the bulk conductivity controlled by applied voltages.

Original languageEnglish
Pages (from-to)L345-L347
JournalJapanese Journal of Applied Physics
Volume44
Issue number8-11
DOIs
StatePublished - 2005

Keywords

  • Conductivity switching
  • Endurance
  • On/off ratio
  • Schottky-type conduction
  • ZrO thin films

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