Giant and stable conductivity switching behaviors in ZrO2 films deposited by pulsed laser depositions

Soohong Kim, Iksu Byun, Inrok Hwang, Jinsoo Kim, Jinsik Choi, Bae Ho Park, Sunae Seo, Myoung Jae Lee, David H. Seo, Dong Seok Suh, Yong Soo Joung, In Kyeong Yoo

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29 Scopus citations

Abstract

ZrO2 films have been deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition methods. Giant and stable conductivity switching behaviors with maximum on/off ratio of 106 and switching endurance of 105 times are observed in a typical Pt/ZrO 2/Pt structure. The Pt/ZrO2/Pt structure exhibits two ohmic behaviors in the low-voltage region (V < 1.4V) depending on the value of previously applied voltage and Schottky-type conduction in the high-voltage region (1.4V < V < 8.9 V). It seems that the conductivity switching behaviors result from the changes in both the Schottky barrier and the bulk conductivity controlled by applied voltages.

Original languageEnglish
Pages (from-to)L345-L347
JournalJapanese Journal of Applied Physics
Volume44
Issue number8-11
DOIs
StatePublished - 2005

Keywords

  • Conductivity switching
  • Endurance
  • On/off ratio
  • Schottky-type conduction
  • ZrO thin films

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