Abstract
ZrO2 films have been deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition methods. Giant and stable conductivity switching behaviors with maximum on/off ratio of 106 and switching endurance of 105 times are observed in a typical Pt/ZrO 2/Pt structure. The Pt/ZrO2/Pt structure exhibits two ohmic behaviors in the low-voltage region (V < 1.4V) depending on the value of previously applied voltage and Schottky-type conduction in the high-voltage region (1.4V < V < 8.9 V). It seems that the conductivity switching behaviors result from the changes in both the Schottky barrier and the bulk conductivity controlled by applied voltages.
Original language | English |
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Pages (from-to) | L345-L347 |
Journal | Japanese Journal of Applied Physics |
Volume | 44 |
Issue number | 8-11 |
DOIs | |
State | Published - 2005 |
Keywords
- Conductivity switching
- Endurance
- On/off ratio
- Schottky-type conduction
- ZrO thin films