Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study

  • Romel Hidayat
  • , Khabib Khumaini
  • , Hye Lee Kim
  • , Tanzia Chowdhury
  • , Tirta Rona Mayangsari
  • , Seongjae Cho
  • , Byungchul Cho
  • , Sangjoon Park
  • , Jongwan Jung
  • , Won Jun Lee

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

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