Experimental investigations using femtosecond and picosecond laser pulses at 800 nm illuminate the distinctions between the dynamics and nature of ultrafast processing of dielectrics compared with semiconductors and metals. Dielectric materials are strongly charged at the surface on the sub-ps time scale and undergo an impulsive Coulomb explosion prior to thermal ablation. Provided the laser pulse width remains in the ps or sub-ps time domain, this effect can be exploited for processing. In the case of thermal ablation alone, the high localization of energy accompanied by ultrafast laser microstructuring is of great advantage also for high quality processing of thin metallic or semiconducting layers, in which the surface charge is effectively quenched.
|Number of pages||6|
|Journal||Applied Physics A: Materials Science and Processing|
|State||Published - Jul 2003|