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Formation, nature, and stability of the arsenic-silicon-oxygen alloy for plasma doping of non-planar silicon structures
Peter L.G. Ventzek, Kyoung E. Kweon, Hirokazu Ueda, Masahiro Oka, Yasuhiro Sugimoto, Gyeong S. Hwang
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations