First-principles mechanistic study of the initial growth of SRO by atomic layer deposition on TiO₂-terminated SrTiO₃ (001)

Engineering & Materials Science

• Atomic layer deposition 100%
• Adsorption 63%
• Monolayers 42%
• Thin films 30%
• Surface diffusion 25%
• Density functional theory 24%
• Perovskite 22%
• Surface chemistry 21%
• Semiconductor devices 19%
• Atoms 16%
• Permittivity 16%
• Oxides 14%
• Decomposition 11%
• Temperature 6%

Physics & Astronomy

• atomic layer epitaxy 67%
• adsorption 49%
• cycles 21%
• oxidizers 21%
• surface diffusion 17%
• thin films 16%
• semiconductor devices 16%
• chemistry 14%
• perovskites 13%
• density functional theory 12%
• decomposition 12%
• saturation 11%
• permittivity 11%
• dosage 10%
• oxides 10%
• kinetics 9%
• atoms 8%
• temperature 4%
• energy 4%

Chemical Compounds

• Atomic Layer Epitaxy 75%
• Deposition Process 35%
• Monolayer 24%
• Adsorption 24%
• Surface Diffusion 20%
• Adsorption Energy 16%
• Surface Chemistry 14%
• Dielectric Constant 14%
• Dielectric Material 14%
• Dose 12%
• Semiconductor 12%
• Decomposition 10%
• Surface 10%
• Density Functional Theory 10%
• Oxide 8%
• Liquid Film 7%