Femtosecond laser ablation of sapphire: Time-of-flight analysis of ablation plume

H. Varel, M. Wähmer, A. Rosenfeld, D. Ashkenasi, E. E.B. Campbell

Research output: Contribution to journalArticlepeer-review

101 Scopus citations

Abstract

Time-of-flight mass spectrometry has been used to investigate the mass and velocity distributions of positive ions produced on laser ablation of sapphire with ultrashort (200 fs) laser pulses at a wavelength of 790 nm. Aluminium and oxygen ions were observed with the proportion of singly and doubly charged oxygen ions increasing with increasing number of laser shots for a given laser fluence. The ions have extremely high kinetic energies which is attributed to Coulomb explosion from charged defect sites.

Original languageEnglish
Pages (from-to)128-133
Number of pages6
JournalApplied Surface Science
Volume127-129
DOIs
StatePublished - May 1998

Bibliographical note

Funding Information:
This work was financially supported by the BMBF (13N6591, PROBE I).

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