Facile Fabrication of a Two-Dimensional TMD/Si Heterojunction Photodiode by Atmospheric-Pressure Plasma-Enhanced Chemical Vapor Deposition

Yonghun Kim, Soyeong Kwon, Eun Joo Seo, Jae Hyeon Nam, Hye Yeon Jang, Se Hun Kwon, Jung Dae Kwon, Dong Wook Kim, Byungjin Cho

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

A growth technique to directly prepare two-dimensional (2D) materials onto conventional semiconductor substrates, enabling low-temperature, high-throughput, and large-area capability, is needed to realize competitive 2D transition-metal dichalcogenide (TMD)/three-dimensional (3D) semiconductor heterojunction devices. Therefore, we herein successfully developed an atmospheric-pressure plasma-enhanced chemical vapor deposition (AP-PECVD) technique, which could grow MoS2 and WS2 multilayers directly onto PET flexible substrate as well as 4-in. Si substrates at temperatures of <200 °C. The as-fabricated MoS2/Si and WS2/Si heterojunctions exhibited large and fast photocurrent responses under illumination of a green light. The measured photocurrent was linearly proportional to the laser power, indicating that trapping and detrapping of the photogenerated carriers at defect states could not significantly suppress the collection of photocarriers. All the results demonstrated that our AP-PECVD method could produce high-quality TMD/Si 2D-3D heterojunctions for optoelectronic applications.

Original languageEnglish
Pages (from-to)36136-36143
Number of pages8
JournalACS Applied Materials and Interfaces
Volume10
Issue number42
DOIs
StatePublished - 24 Oct 2018

Bibliographical note

Funding Information:
This work was supported by the Fundamental Research Program (No. PNK5890) of the Korea Institute of Materials Science (KIMS) and also the Basic Science Research Program of the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT; Ministry of Science and ICT) (Nos. 2017R1C1B1005076 and 2016R1D1A1A09917491).

Publisher Copyright:
© 2018 American Chemical Society.

Keywords

  • AP-PECVD
  • heterojunctions
  • MoS
  • photodetectors
  • two-dimensional materials

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