Abstract
Micro mirror arrays with hidden joint structures (pin and staples) are designed and fabricated. In order to achieve a high fill-factor and to remove the problems caused by elastic spring structures, a joint structure is placed under the mirror plate. All the structural components except the titanium electrode are fabricated with thermally evaporated aluminum. Semi-cured photoresist and thick photoresist are used for sacrificial layers. The static characteristics of the micro mirror are measured by applying a voltage difference between the mirror plate and an address electrode.
| Original language | English |
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| Pages | 243-247 |
| Number of pages | 5 |
| State | Published - 1997 |
| Event | Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97 - Los Angeles, CA, USA Duration: 9 Sep 1997 → 12 Sep 1997 |
Conference
| Conference | Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97 |
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| City | Los Angeles, CA, USA |
| Period | 9/09/97 → 12/09/97 |