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Fabrication of a vertical sidewall using double-sided anisotropic etching of 〈100〉 oriented silicon
- Hyun Seok Kim
- , Jung Mu Kim
- , Yong Seung Bang
- , Eun Seok Song
- , Chang Hyeon Ji
- , Yong Kweon Kim
Research output: Contribution to journal › Article › peer-review
22
Scopus
citations