Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

Younhwa Kim; Sang Jun Kim; Sang Youl Kim; Sung Hyuck An; Dong Seok Suh; Jin Seo Noh; Sang Mock Lee; Kijoon H.P. Kim; Woong Chul Shin; Yoonho Khang

doi:10.1143/JJAP.45.6452

Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

Younhwa Kim
, Sang Jun Kim
, Sang Youl Kim
, Sung Hyuck An
, Dong Seok Suh
, Jin Seo Noh
, Sang Mock Lee
, Kijoon H.P. Kim
, Woong Chul Shin
, Yoonho Khang

Department of Physics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge₂Sb ₂Te₅ heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.

Original language	English
Pages (from-to)	6452-6454
Number of pages	3
Journal	Japanese Journal of Applied Physics
Volume	45
Issue number	8 A
DOIs	https://doi.org/10.1143/JJAP.45.6452
State	Published - 4 Aug 2006

Keywords

Crystallization kinetic
Ge-Sb-Te
PRAM
Phase change optioal disk
Time-resolved ellipsometry

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10.1143/JJAP.45.6452

Cite this

Kim, Y., Kim, S. J., Kim, S. Y., An, S. H., Suh, D. S., Noh, J. S., Lee, S. M., Kim, K. H. P., Shin, W. C., & Khang, Y. (2006). Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry. Japanese Journal of Applied Physics, 45(8 A), 6452-6454. https://doi.org/10.1143/JJAP.45.6452

@article{9ebf7bb5bddf49b58e80a23d66d22cde,

title = "Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry",

abstract = "An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge2Sb 2Te5 heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.",

keywords = "Crystallization kinetic, Ge-Sb-Te, PRAM, Phase change optioal disk, Time-resolved ellipsometry",

author = "Younhwa Kim and Kim, \{Sang Jun\} and Kim, \{Sang Youl\} and An, \{Sung Hyuck\} and Suh, \{Dong Seok\} and Noh, \{Jin Seo\} and Lee, \{Sang Mock\} and Kim, \{Kijoon H.P.\} and Shin, \{Woong Chul\} and Yoonho Khang",

year = "2006",

month = aug,

day = "4",

doi = "10.1143/JJAP.45.6452",

language = "English",

volume = "45",

pages = "6452--6454",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

number = "8 A",

}

Kim, Y, Kim, SJ, Kim, SY, An, SH, Suh, DS, Noh, JS, Lee, SM, Kim, KHP, Shin, WC & Khang, Y 2006, 'Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry', Japanese Journal of Applied Physics, vol. 45, no. 8 A, pp. 6452-6454. https://doi.org/10.1143/JJAP.45.6452

Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry. / Kim, Younhwa; Kim, Sang Jun; Kim, Sang Youl et al.
In: Japanese Journal of Applied Physics, Vol. 45, No. 8 A, 04.08.2006, p. 6452-6454.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

AU - Kim, Younhwa

AU - Kim, Sang Jun

AU - Kim, Sang Youl

AU - An, Sung Hyuck

AU - Suh, Dong Seok

AU - Noh, Jin Seo

AU - Lee, Sang Mock

AU - Kim, Kijoon H.P.

AU - Shin, Woong Chul

AU - Khang, Yoonho

PY - 2006/8/4

Y1 - 2006/8/4

N2 - An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge2Sb 2Te5 heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.

AB - An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge2Sb 2Te5 heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.

KW - Crystallization kinetic

KW - Ge-Sb-Te

KW - PRAM

KW - Phase change optioal disk

KW - Time-resolved ellipsometry

UR - https://www.scopus.com/pages/publications/33748538732

U2 - 10.1143/JJAP.45.6452

DO - 10.1143/JJAP.45.6452

M3 - Article

AN - SCOPUS:33748538732

SN - 0021-4922

VL - 45

SP - 6452

EP - 6454

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 8 A

ER -

Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

Abstract

Keywords

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