Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

Younhwa Kim; Sang Jun Kim; Sang Youl Kim; Sung Hyuck An; Dong Seok Suh; Jin Seo Noh; Sang Mock Lee; Kijoon H.P. Kim; Woong Chul Shin; Yoonho Khang

doi:10.1143/JJAP.45.6452

Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

Younhwa Kim, Sang Jun Kim, Sang Youl Kim, Sung Hyuck An, Dong Seok Suh, Jin Seo Noh, Sang Mock Lee, Kijoon H.P. Kim, Woong Chul Shin, Yoonho Khang

Department of Physics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge₂Sb ₂Te₅ heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.

Original language	English
Pages (from-to)	6452-6454
Number of pages	3
Journal	Japanese Journal of Applied Physics
Volume	45
Issue number	8 A
DOIs	https://doi.org/10.1143/JJAP.45.6452
State	Published - 4 Aug 2006

Keywords

Crystallization kinetic
Ge-Sb-Te
PRAM
Phase change optioal disk
Time-resolved ellipsometry

Access to Document

10.1143/JJAP.45.6452

Cite this

Kim, Y., Kim, S. J., Kim, S. Y., An, S. H., Suh, D. S., Noh, J. S., Lee, S. M., Kim, K. H. P., Shin, W. C., & Khang, Y. (2006). Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry. Japanese Journal of Applied Physics, 45(8 A), 6452-6454. https://doi.org/10.1143/JJAP.45.6452

@article{9ebf7bb5bddf49b58e80a23d66d22cde,

title = "Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry",

abstract = "An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge2Sb 2Te5 heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.",

keywords = "Crystallization kinetic, Ge-Sb-Te, PRAM, Phase change optioal disk, Time-resolved ellipsometry",

author = "Younhwa Kim and Kim, {Sang Jun} and Kim, {Sang Youl} and An, {Sung Hyuck} and Suh, {Dong Seok} and Noh, {Jin Seo} and Lee, {Sang Mock} and Kim, {Kijoon H.P.} and Shin, {Woong Chul} and Yoonho Khang",

year = "2006",

month = aug,

day = "4",

doi = "10.1143/JJAP.45.6452",

language = "English",

volume = "45",

pages = "6452--6454",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

number = "8 A",

}

Kim, Y, Kim, SJ, Kim, SY, An, SH, Suh, DS, Noh, JS, Lee, SM, Kim, KHP, Shin, WC & Khang, Y 2006, 'Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry', Japanese Journal of Applied Physics, vol. 45, no. 8 A, pp. 6452-6454. https://doi.org/10.1143/JJAP.45.6452

Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry. / Kim, Younhwa; Kim, Sang Jun; Kim, Sang Youl et al.
In: Japanese Journal of Applied Physics, Vol. 45, No. 8 A, 04.08.2006, p. 6452-6454.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

AU - Kim, Younhwa

AU - Kim, Sang Jun

AU - Kim, Sang Youl

AU - An, Sung Hyuck

AU - Suh, Dong Seok

AU - Noh, Jin Seo

AU - Lee, Sang Mock

AU - Kim, Kijoon H.P.

AU - Shin, Woong Chul

AU - Khang, Yoonho

PY - 2006/8/4

Y1 - 2006/8/4

N2 - An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge2Sb 2Te5 heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.

AB - An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge2Sb 2Te5 heated by electrical pulses of 20-100ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ∼15 μm.

KW - Crystallization kinetic

KW - Ge-Sb-Te

KW - PRAM

KW - Phase change optioal disk

KW - Time-resolved ellipsometry

UR - http://www.scopus.com/inward/record.url?scp=33748538732&partnerID=8YFLogxK

U2 - 10.1143/JJAP.45.6452

DO - 10.1143/JJAP.45.6452

M3 - Article

AN - SCOPUS:33748538732

SN - 0021-4922

VL - 45

SP - 6452

EP - 6454

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 8 A

ER -

Experimental setup for in Situ investigation of phase changing behavior in phase-change random-access memory medium by microfocusing nanosecond-time-resolved ellipsometry

Abstract

Keywords

Access to Document

Fingerprint

Cite this