An operating system has become essential to simplify the design of software for embedded systems, and this in turn requires accurate analyses of OS performance to help with more power-aware and efficient computing. For this purpose, we attempt to evaluate the major Linux subsystems: process management, memory management, inter-process communication (IPC), and networking, while changing the organization of the core components of the CPU such as cache size, clock frequency, memory management unit (MMU), and floating-point unit (FPU). We run a set of benchmark applications which separately assess the OS services provided by each subsystem. The experimental results are then analyzed as regards the CPU design parameters. As a consequence, we observe that changes in the design parameters exert a varying degree of influence over the system performance depending on OS services: In the best case, performance improvement reaches 100% while ranging from 34% to 36% on average.