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Excimer laser ablation of polyimide
G. Ulmer
, B. Hasselberger
, H. G. Busmann
, E. E.B. Campbell
Department of Physics
Research output
:
Contribution to journal
›
Article
›
peer-review
37
Scopus citations
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Physics
Laser Ablation
100%
Angular Distribution
100%
Excimer Laser
100%
Positive Ion
50%
Fluence
50%
Supersonics
50%
Engineering
Excimer Laser
100%
Angular Distribution
100%
Laser Fluence
50%