Excimer laser ablation of polyimide

G. Ulmer; B. Hasselberger; H. G. Busmann; E. E.B. Campbell

doi:10.1016/0169-4332(90)90155-S

Excimer laser ablation of polyimide

G. Ulmer, B. Hasselberger, H. G. Busmann, E. E.B. Campbell

Department of Physics

Research output: Contribution to journal › Article › peer-review

37 Scopus citations

Abstract

The velocity and angular distributions of the positively charged, negatively charged and neutral products from 308 nm laser ablation of polyimide have been investigated. The differences in the distributions for the three kinds of products can be attributed to the different formation mechanisms. Positive ions are formed in the centre of the laser focus and are ejected with a cos⁴θ distribution about the surface normal. Neutral and negatively charged products show a cos θ angular distribution. All products are ejected with supersonic velocities with v_positive>v_negative>v_neutral for a given laser fluence.

Original language	English
Pages (from-to)	272-278
Number of pages	7
Journal	Applied Surface Science
Volume	46
Issue number	1-4
DOIs	https://doi.org/10.1016/0169-4332(90)90155-S
State	Published - 2 Dec 1990

Bibliographical note

Funding Information:
The authors would like to thank Professor I.V. Hertel for his interest in the present work. Financial support by the Bundesministerium fur Forschung und Technologie (BMFT) under contract number 13N5628 “Materialbearbeitung mit Excimerlasern” is gratefully acknowledged.

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10.1016/0169-4332(90)90155-S

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title = "Excimer laser ablation of polyimide",

abstract = "The velocity and angular distributions of the positively charged, negatively charged and neutral products from 308 nm laser ablation of polyimide have been investigated. The differences in the distributions for the three kinds of products can be attributed to the different formation mechanisms. Positive ions are formed in the centre of the laser focus and are ejected with a cos4θ distribution about the surface normal. Neutral and negatively charged products show a cos θ angular distribution. All products are ejected with supersonic velocities with vpositive>vnegative>vneutral for a given laser fluence.",

author = "G. Ulmer and B. Hasselberger and Busmann, {H. G.} and Campbell, {E. E.B.}",

note = "Funding Information: The authors would like to thank Professor I.V. Hertel for his interest in the present work. Financial support by the Bundesministerium fur Forschung und Technologie (BMFT) under contract number 13N5628 “Materialbearbeitung mit Excimerlasern” is gratefully acknowledged.",

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doi = "10.1016/0169-4332(90)90155-S",

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T1 - Excimer laser ablation of polyimide

AU - Ulmer, G.

AU - Hasselberger, B.

AU - Busmann, H. G.

AU - Campbell, E. E.B.

N1 - Funding Information: The authors would like to thank Professor I.V. Hertel for his interest in the present work. Financial support by the Bundesministerium fur Forschung und Technologie (BMFT) under contract number 13N5628 “Materialbearbeitung mit Excimerlasern” is gratefully acknowledged.

PY - 1990/12/2

Y1 - 1990/12/2

N2 - The velocity and angular distributions of the positively charged, negatively charged and neutral products from 308 nm laser ablation of polyimide have been investigated. The differences in the distributions for the three kinds of products can be attributed to the different formation mechanisms. Positive ions are formed in the centre of the laser focus and are ejected with a cos4θ distribution about the surface normal. Neutral and negatively charged products show a cos θ angular distribution. All products are ejected with supersonic velocities with vpositive>vnegative>vneutral for a given laser fluence.

AB - The velocity and angular distributions of the positively charged, negatively charged and neutral products from 308 nm laser ablation of polyimide have been investigated. The differences in the distributions for the three kinds of products can be attributed to the different formation mechanisms. Positive ions are formed in the centre of the laser focus and are ejected with a cos4θ distribution about the surface normal. Neutral and negatively charged products show a cos θ angular distribution. All products are ejected with supersonic velocities with vpositive>vnegative>vneutral for a given laser fluence.

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U2 - 10.1016/0169-4332(90)90155-S

DO - 10.1016/0169-4332(90)90155-S

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SN - 0169-4332

VL - 46

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EP - 278

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -

Excimer laser ablation of polyimide

Abstract

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